Abstract:An oxygen-zinc plasma and an oxygen-zinc-aluminum plasma are formed by pulsed laser ablation of a Zn target or pulsed laser co-ablation of a Zn target and an Al target in an electron cyclotron resonance (ECR) discharge-generated oxygen plasma for the deposition of ZnO and Al-doped ZnO (AZO) films. The plasmas are characterized spectroscopically by time-integrated and time-resolved optical emission spectroscopy. Both the oxygen-zinc plasma and the oxygen-zinc-aluminum plasma contain excited species originally present in the working O2 gas and energetic species ablated from the targets. The optical emission of the oxygen-zinc-aluminum plasma is abundant in the emission bands of oxygen molecular ions and the emission lines of mono-atomic oxygen, zinc and aluminum atoms and atomic ions. The time-integrated spectra as well as the time-resolved spectra of the plasma emission indicate that the oxygen species in the ECR oxygen plasma experience additional excitation by the expanding ablation plumes, and the ablated species are excited frequently when traveling accompanying the plume expansion in the oxygen plasma, making the formed plasma highly excited and very reactive, which plays an important role in the reactive growth of ZnO matrix and the in-situ doping of Al into the growing ZnO matrix. The deposited ZnO and AZO films were evaluated for composition analysis by energy dispersive X-ray spectroscopy, structure characterization by X-ray diffraction and optical transmission measurement. The deposited ZnO is slightly rich in O. The Al concentration of the AZO films can be controlled and varied simply by changing the repetition rate of the laser used for Al target ablation. Both the ZnO and the AZO films are featured with hexagonal wurtzite crystal structure and exhibit high optical transparency in a wide spectral region. Al doping results in an improvement in the ultraviolet transparency, a blue shift in the absorption edge and a widening of the band gap.

Glancing-incidence X-ray Analysis of ZnO Thin Films and ZnO/ZnMgO Heterostructures Grown by Laser-Mbe

XRD Analysis ZnO Frown by Laser Molecular Beam Epitaxy

Structural and Optical Characterizations of ZnO Films Grown by Reactive Electron Beam Evaporation

Interface structures of inclined ZnO thin film on (011)-MgO substrate with bulk-like optical properties

Structural and Optical Studies of Mg(X)Zn(1-X)Ofilms Grown on Sapphire

Tuning the Surface Morphologies and Properties of ZnO Films by the Design of Interfacial Layer.

Low-Temperature Epitaxy Of Zno Films On Si(001) And Silica By Reactive E-Beam Evaporation

MOCVD growth and properties of ZnO and Zn1-xMgxO films

High-quality ZnO/GaN/Al2O3 Heteroepitaxial Structure Grown by LP–MOCVD

Coupling Behaviors of Large Lattice Mismatch Interfaces Between Hexagonal ZnO and Cubic (001)Mgo

Structural, optical and electrical properties of ZnO films grown by pulsed laser deposition (PLD)

Annealing Effect on ZnO Thin Films Grown by Laser-MBE

Interface And Optical Properties Of Zn1-Xmgxo Films With Mg Content Of More Than 70% Grown On The (1(2)Over-Bar10)-Zno Substrates

Optical Characterization of ZnO and ZnMgO Films on A-Plane Sapphires by Molecular Beam Epitaxy

Characterization of Zno Films Grown on Different Substrates by L-Mbe Method

Spectroscopic characterization of the plasmas formed during the deposition of ZnO and Al-doped ZnO films by plasma-assisted pulsed laser deposition

Surface Morphology, Structural and Optical Properties of Polar and Non-Polar ZnO Thin Films: A Comparative Study

Structural and optical properties of ZnO films grown on the AAO templates

Study of the Optical Properties of Zno Thin Films Prepared by Laser Molecular Beam Epitaxy

Laser molecular beam epitaxy of ZnO thin films and heterostructures

Interface and optical properties of Zn1−xMgxO films with Mg content of more than 70% grown on the (12̄10)-ZnO substrates