Abstract:The invention discloses a grating displacement measuring system based on heterodyne interference and a secondary diffraction effect. The grating displacement measuring system comprises a dual-frequency laser device, an unpolarized beam splitter, a polarized beam splitter, a first reflecting mirror, a second reflecting mirror, a third reflecting mirror, a 1/4 wave plate, a grating, a first polaroid analyzer, a second polaroid analyzer, a first photoelectric detector, a second photoelectric detector, a first front amplifier, a second front amplifier, a frequency mixer, and a subdivision processing circuit, wherein the dual-frequency laser device emits linearly polarized light f1 and f2 with a special frequency difference; f1 is s polarized light, f2 is p polarized light; grating spacing is d and is used for reflection diffraction of incident light; the first polaroid analyzer and the second polaroid analyzer are used for synthesizing new linear polarized light and generating a beat frequency signal; the first photoelectric detector and the second photoelectric detector are used for converting the beat frequency signal into an electric signal; the first front amplifier and the second front amplifier are used for high magnification with automatic gain of the electric signal; the frequency mixer is used for demodulating a frequency shifting signal delta f; the subdivision processing circuit is used for completing subdivision and phase discrimination of the electric signal.

Doppler Effect of Moving Grating and Its Application on Tiny Displacement Measurement

Analysis of black-grating-effect on the displacement measurement based on phase-coded target joint transform correlators

Nanometer-scale Displacement Sensor Based on Phase-Sensitive Diffraction Grating.

A High-Resolution Displacement Sensor Based on a Grating Interferometer with the Phase Modulation Technique

Subnanometer Resolution Displacement Sensor Based on a Grating Interferometric Cavity with Intensity Compensation and Phase Modulation

The Effect on Doppler Frequency Shift by Measurement Prism 3-Dimension Motion

A Displacement Measuring System Based on Grating Double Diffraction

An Ultracompact Angular Displacement Sensor Based on the Talbot Effect of Optical Microgratings

An ultracompact high-resolution displacement sensor based on self-interference effect of single optical nanograting

Optical Grating Diffraction and Optical Beat Frequency Principle-Based Ultrahigh Resolution Displacement Measurement System

High-precision Microdisplacement Sensor Based on Zeroth-Order Diffraction Using a Single-Layer Optical Grating.

Large-scale range diffraction grating displacement sensor based on polarization phase-shifting

Grating displacement measuring system based on heterodyne interference and secondary diffraction effect

Overview of 2D Grating Displacement Measurement Technology

Doppler shift generated by a moving diffraction grating under incidence by polychromatic diffuse light

Study on the micro-displacement measurement by laser interference and image processing methods

Two-dimensional optical micro displacement sensing and crosstalk elimination based on the self-imaging effect of a grating pair

High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving

Displacement Measurement Method Based on Integrated Grating Interferometry with Two-Wavelength Lasers

Interferometric Detection Method for Micro-Displacement Based on Integrated Diffraction Grating

Nanoscale Displacement Measurement in A Variable-Air-Gap Optical Waveguide