Abstract:With the advancement of micro/nanotechnology, precise control of the interaction between light and matter at the micro/nanoscale is crucial for successful material processing and surface functionalization. Ultrafast lasers with ultra-short pulses have gained attention due to their high spatial resolution and low thermal damage, enabling extremely smooth and precise machining on various metal surfaces. At the same time, shorter pulse nanosecond lasers, which have a wider application range, strike a balance between achieving high-precision microfabrication and mitigating adverse thermal effects caused by millisecond lasers. By adjusting laser processing parameters, it is possible to create large-scale micro/nanostructures with complex shapes, delicate textures, and special functionalities, applicable in fields such as optics, electronics, and biomedicine. Short/ultrafast pulse laser fabrication technology opens up more possibilities and prospects for the realization of diverse functional micro/nanostructures. This comprehensive review provides an overview of the interaction mechanisms between short/ultra-short-pulse laser micro/nanoprocessing and materials. By integrating theoretical models such as the two-temperature model and the Drude–Lorentz model, along with comprehensive numerical simulation methods, a brief summary of the ablation behavior of metal surfaces under short/ultra-short-pulse lasers is provided. Furthermore, we delve into the controllability of microstructures, laser-induced periodic surface structures at the nanoscale, and other types of nanostructures under different processing conditions. Thorough analysis and discussion are conducted from multiple perspectives, including surface topography and functional impacts. Subsequently, the focus shifts to the functionalization of metal surfaces with micro/nanostructures, and an in-depth investigation and review are conducted in areas such as surface wettability, bio-inspired surfaces, optical diffraction, and advanced biomedicine. Finally, the advantages and limitations of laser texturing processing techniques are discussed, and the future development of functionalized metal surfaces is anticipated.

Advanced materials processing based on interaction of laser beam and a medium

Hybrid Laser Processing for Microfabrication of Glass

Microfabrication Assisted by Laser-Trapped Microparticle Tools

Laser-Induced-Plasma-Assisted Ablation for Glass Microfabrication

Femtosecond laser hybrid processing strategy of transparent hard and brittle materials

Laser Machining at High ∼PW/cm2 Intensity and High Throughput

Laser-induced microjet-assisted ablation for high-quality microfabrication

Ultrafast Bessel beams; advanced tools for laser materials processing

Laser machining fundamentals: micro, nano, atomic and close-to-atomic scales

Etching-assisted femtosecond laser modification of hard materials

Laser ablation and micromachining with ultrashort laser pulses

Ultrafast laser processing of materials: from science to industry

Laser-based hybrid micromachining processes: A review

Laser-Induced Cavitation-Assisted True 3D Nano-Sculpturing of Hard Materials

A Review of an Investigation of the Ultrafast Laser Processing of Brittle and Hard Materials

Laser Micro-Fabrication/Manipulation of Dielectric Materials

Atomic‐Level Insight into the Formation of Subsurface Dislocation Layer and Its Effect on Mechanical Properties During Ultrafast Laser Micro/Nano Fabrication

Micro/nanoengineering of functionalized metal surfaces based on short/ultra-short-pulsed lasers: a review

Laser-induced-plasma assisted ablation and its applications

Laser Processing of Hard and Ultra-Hard Materials for Micro-Machining and Surface Engineering Applications

Microscopic Processing of Transparent Material with Nanosecond and Ultrafast Lasers