Crystallization of Boric Acid on Low-K Glass+ Ceramic Green Tapes

JH Jean
DOI: https://doi.org/10.1143/jjap.35.l429
1996-01-01
Abstract:Crystallization at room temperature on the surface of low-k glass+ceramic green tapes, containing a low-softening-point borosilicate glass and a high-softening-point high silica glass has been investigated. Results of diffuse reflectance Fourier transform infrared (FTIR) and Raman microprobe spectra show that the crystals are boric acid: formed by reaction of the boric oxide in the borosilicate glass with water in an ambient atmosphere. A faster and greater degree of crystallization is observed with increased level of relative humidity in the ambient atmosphere. To minimize the formation of boric acid crystals on the green tapes, a relative humidity of 15% or less is required.
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