Angle Distribution Study of H_2 Molecules Produced in The Abstaction Reaction of Incident H Atoms on H-Si(100)

Yang Sheng-hong
2007-01-01
Abstract:With a rotatable quadrupole mass spectrometer (QMS), angle distributions of H2 molecules produced in the abstraction reaction of incident H atoms on hydrogenated Si(100) have been investigated. An exceptionally wide angular distribution, which can be fitted by cosnθf with n 1, was observed. The angular distributions of desorbing H2 molecules are independent of the surface temperature and the surface reconstruction. According to the mechanisms of Si surface reconstructions, these results are interpreted by non-activated pathways.
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