High Quality Mechanical and Optical Properties of Commercial Silicon Nitride Membranes

B. M. Zwickl,W. E. Shanks,A. M. Jayich,C. Yang,A. C. Bleszynski Jayich,J. D. Thompson,J. G. E. Harris
DOI: https://doi.org/10.1063/1.2884191
IF: 4
2008-01-01
Applied Physics Letters
Abstract:We have measured the optical and mechanical loss of commercial silicon nitride membranes. We find that 50nm thick, 1mm2 membranes have mechanical Q>106 at 293K, and Q>107 at 300mK, well above what has been observed in devices with comparable dimensions. The near-IR optical loss at 293K is less than 2×10−4. This combination of properties make these membranes attractive candidates for studying quantum effects in optomechanical systems.
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