Research Progress of Materials and Fabrication Methods of Microfluidic Chip

ZHENG Xiao-lin,YAN Jia-wen,HU Ning,YANG Jing,YANG Jun
DOI: https://doi.org/10.3969/j.issn.1000-9787.2011.06.001
2011-01-01
Abstract:Research progress of materials and fabrication methods of microfluidic chip is reviewed.On the basis of the introduction of traditional materials such as silicon,glass and quartz,the application trend of polymer in the chip-fabrication fields is emphasized.For different materials,their properties,application range and fabrication methods are described in detail.Some new fabrication methods such as laser cutting,soft lithography and LIGA and their application in this field are specially introduced.A simple and systemic review on the materials and fabrication methods in microfluidic chip is given,and it has important reference value for the researchers in microfluidic chip and miniaturized total analysis system fields.
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