Phasemeter With External Trigger Applied To Pzt-Modulated Interferometer

Dejiao Lin,Juqun Yan,Zhixia Chao,Hong Jiang,Chunyong Yin
DOI: https://doi.org/10.1080/0020721031000093147
2002-01-01
International Journal of Electronics
Abstract:The heterodyne interferometric system based on phase measurement plays a significant role in modern metrology fields owing to its convenience of signal processing. In this paper, a phase measurement scheme to determine the fraction of the interference fringe modulated by a PZT in a differential single-frequency interferometer is investigated. To overcome the problem of phase jump and inhomogeneous period of the signal, a differential phase discrimination approach with an external trigger signal is presented. The phase measurement system is carried out using a field-programmable gate array (FPGA) device. It is testified by experiments that, over a frequency range of 300 Hz-10 kHz, the phase measurement system has a stability of +/-0.015degrees and a maximum error of +/-0.07degrees.
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