Effect of annealing on residual stress of NiTi alloy surface implanted by oxygen ion

Wang Qiang,Wang Biao,Ma Decai,Dai Fulong
DOI: https://doi.org/10.3969/j.issn.1001-1382.2007.02.008
2007-01-01
Abstract:Because the interaction of the plasma and the surface of NiTi alloy can modify the performance on the surface, the ion implantation has highly applicable value on many fields such as engineering and biomedical technologies. After the oxygen ions implanted into NiTi alloy, the titanium oxide film was formed on the surface of NiTi alloy. The residual stresses between the targeted substrate and the ion implantation layer emerged from the lattice mismatch between the thin film and substrate and the mismatch of thermal expansion. The residual stress was measured by using the moire interferometry combined with hole-drilling method and the influence of anneal treatment was investigated on the residual stress.
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