An Indirect Method for Measuring Electron Density of Atmospheric Pressure Plasma Jets

Liu Liying,Zhang Jialiang,Wang Dezhen
DOI: https://doi.org/10.1088/1009-0630/11/6/11
2009-01-01
Abstract:An indirect method for measuring the electron density of radio frequency atmospheric pressure plasma jets (RF-APPJ) based on the discharge voltage and current wave forms is presented. An equivalent circuit of the plasma discharge is assumed by taking into account the electrode capacitance, serial resistance and inductance of the bulk plasma, as well as the sheath impedance. Based on the circuit model, the electron density can be obtained according to Ohm's law. By using this method, the effects of the electrode shape and discharge gap on the electron density are discussed.
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