Production of Highly Enriched 28si Using SiHCl3 As the Processing Gas

ZHOU Mingsheng,WEI Xiongfei,ZENG Shi
DOI: https://doi.org/10.3321/j.issn:1000-0054.2005.12.016
2005-01-01
Abstract:Silicon isotopes were separated in a gas centrifuge to produce highly enriched~(28)Si) isotope.The molecule compositions of SiHCl_3 with various combinations of the isotopes of the three elements were calculated based on the abundance of the various isotopes.The results indicate that despite chlorine having two isotopes,SiHCl_3 can still be used as a processing gas to separate the(()~(28)Si) isotope.Experiments using a cascade of four gas centrifuges enriched the(()~(28)Si) fraction to 99% using SiHCl_3.Highly enriched SiHCl_3 from the centrifugal separation was then directly used in the production of silicon without additional chemical conversion.The results show that highlyenriched(()~(28)Si) can be obtained by centrifugal separation of SiHCl_3.
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