Electromagnetic Force FEM Analysis of Magnetic Levitation Motion Stage

WANG Weiming,YU Chi,MA Shuyuan,XIE Hu
DOI: https://doi.org/10.3969/j.issn.1001-6848.2011.10.006
2011-01-01
Abstract:The FEM analysis for decoupling the horizontal force and levitation force of the maglev motion stage was proposed.The composition and working principle of two-dimensional maglev motion stage were introduced,and the force decoupling theoretical model was put forward.The maglev linear motor was used as a current-carrying equipment,its lorentz force density was calculated with the FEM,and the nonlinearity factors of the electromagnetic force and the decoupling force model drived with three-phase ac were analysed.The results indicate that the dynamic decoupling of the horizontal force and levitation force can be realized according to stage position by applying different AC currents.This method has certain significance for the control research of the maglev motion stages.
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