Microstructure Characterization of High-Energy Product Nd-Fe-B Thin Film

Fang Xu,Fang Yang,Xian-ping Dong,Lan-ting Zhang,Wei Liu,Zhi-dong Zhang

DOI: https://doi.org/10.1016/s1002-0071(12)60010-0

2010-01-01

Abstract:A Si/Mo(50 nm)/Nd-Fe-B(400 nm)/Mo(50 nm) film with relatively high-energy product (BH)(max perpendicular to)=247 kJ/m(3)) was prepared on a Si substrate heated at 650 degrees C. The microstructure of the film was investigated by X-ray diffractometry (XRD) and high-resolution transmission electron microscopy (HRTEM). The Nd-Fe-B thin film shows a notable out-of-plane c-axis texture. The (110) orientated Mo grains is proved to promote the growth of c-axis oriented texture of the Nd2Fe14B grains, which is favorable to achieve a high remanence. Nano-scale spherical Nd-O phases composed of randomly orientated polycrystalline grains and a sharp grain boundary without grain boundary phase between two Nd2Fe14B grains are observed. The coercivity highly depends on a certain amount of Nd-O phase and interface morphology.