Improvement of the Bonding Strength between EVAL and 316L Stainless Steel by RF Plasma Treatment

YUAN Yuan,YIN Min,YIN Zhi-Lan,LIU Chang-Sheng

DOI: https://doi.org/10.3969/j.issn.0258-8021.2006.01.020

2006-01-01

Abstract:In order to enhance the adhesion of EVAL on 316L stainless steel,the substrate was pretreated by low frequency RF plasma.The influence of different gas plasma(Ar plasma,N_2 plasma,two steps including Ar and N_2 plasma) on the bonding strength was investigated.The results indicated that the plasma pretreatment could significantly improve the adhesion of EVAL on substrate and the bonding strength of EVAL on the substrate pretreated by Ar plasma,N_2 plasma,and two steps plasma reached 0.92MPa,1.2MPa,1.5MPa,respectively(Control was 0.15MPa).ATR-FTIR revealed that the carbon hydrogen contaminations were entirely removed from the surface of the substrates after treated by Ar plasma and N_2 plasma.AFM analysis showed that more roughness existed on the surface of sample treated by argon plasma than treated by N_2 plasma.XPS analysis showed that EVAL physically absorbed on the surface of substrate treated by argon plasma,but after treated by nitrogen plasma,some hydroxyl groups of EVAL reacted with Fe-N to form Fe-N-O bond.It could be confirmed that the adhesive improvement of EVAL on 316L stainless steel treated by Ar plasma relatedto cleaning and etching effects.The enhancement of bonding strength by N_2 plasma pretreatment was resulted from the cleaning and reaction effects,and the two steps process,cleaning effect,etching effect,reaction effect were combined to lead to the highest bonding strength.