Abstract:Lithium niobate (LiNbO3, LN) has found extensive applications because of its unique optical properties, such as acousto-optic, electro-optic, piezoelectric, ferroelectric and nonlinear optic effects. Conventionally, a waveguide in a LN crystal is fabricated using metal diffusion, ion exchange, or proton exchange. Waveguides in LN are used for high-speed modulation or for nonlinear devices such as parametric oscillators and amplifiers. Thin LN films can also be separated from bulk and transferred to other substrates such as silicon and gallium arsenide by crystal ion slicing. The refractive indices and the electro-optical coefficient of the fabricated thin films have already been investigated. Suspended waveguides have been widely applied to silicon-on-insulator structures because they are easily fabricated with processing techniques similar to those of integrated circuit design. However, it is difficult to fabricate such structures in LN. One main challenge is the difficulty of etching LN. Here, we show a method to fabricate suspended slab waveguides and photonic crystals (PCs) in LN by combining ion implantation, focused ion beam milling and selective wet etching techniques. The method does not involve wafer bonding or crystal ion slicing and is monolithic. Lattice damage can be introduced to a buried thin layer of a certain depth beneath sample surface by ion implantation, resulting in a considerable wet etching selectivity to bulk material. Profiles of PCs can be improved dramatically by truncating the cone-shaped bottoms. Our method can effectively be applied to bulk LN wafers, which are typically of much higher quality than epitaxial LN.

Research Development on LiNbO_3 Dry Etching

Research of Selective Etching in LiNbO3 Using Proton-Exchanged Wet Etching Technique

Advanced Etching Techniques of LiNbO3 Nanodevices

State of the Art in Crystallization of LiNbO3 and Their Applications

Investigation of etching two-dimensional microhole lattice array on lithium niobate with focused ion beam for fabricating photonic crystals

Interference Lithography Patterned Nanogratings in LiNbO3 Fabricated by Dry Etching

Photonic crystal fabrication in lithium niobate via pattern transfer through wet and dry etched chromium mask

Recent Progress in Thin-Film Lithium Niobate Photonic Crystal [Invited]

Improved profiles of photonic crystals in Lithium Niobate by truncating tapered bottoms

Selective Etching in LiNbO3 Combined of MeV O and Si Ion Implantation with Wet-Etch Technique

Preparation of LiNbO3 Thin Film on Insulator for High-Performance Lithium Niobate Devices

LiNbO3 Crystals: from Bulk to Film

Recent Progress in Lithium Niobate: Optical Damage, Defect Simulation, and On‐Chip Devices

Omni‐functional crystal: Advanced methods to characterize the composition and homogeneity of lithium niobate melts and crystals

Surface Etching Of Mgo:Linbo3 Crystal By Ti Metal For Integrated Optics

The Research and Development on the Properties of Photoluminescence of Lithium Niobate

The photo-assisted wet-etching effect in lithium niobate crystals by laser irradiation at different wavelengths

Isotropic atomic layer etching of MgO-doped lithium niobate using sequential exposures of H$_2$ and SF$_6$ plasmas

Photonic Micro and Sub-Micro Structures in LiNbO3 Crystals

Ion-cut Lithium Niobate on Insulator Technology: Recent Advances and Perspectives

Fabrication of Lithium Niobate Fork Grating by Laser-Writing-induced Selective Chemical Etching