Influence of Annealing Condition on Photoluminescence Characteristics of Algaas/Gaas Multiple Quantum Well

MJ Ying,YY Xia,PJ Liu,XD Liu,MW Zhao,Z Wang
DOI: https://doi.org/10.1016/s0167-577x(02)01399-x
IF: 3
2003-01-01
Materials Letters
Abstract:The energy levels in AlGaAs/GaAs multiple quantum well (MQW) were calculated with transfer matrix method (TMM) and compared with experimental results from photoluminescence (PL) measurements. The comparison shows good agreement. A thin layer of sputtered SiO2 film was deposited on AlGaAs/GaAs MQW samples and a subsequent rapid thermal annealing (RTA) was carried out. Photoluminescence (PL) measurements showed that the PL characteristics of the wells at different depths beneath the surface of the AlGaAs/GaAs MQW behave differently with the change of RTA condition. The PL intensities of the wells close to the surface and the bottom of the AlGaAs/GaAs MQW are sensitive to the RTA condition, while those of the wells in the middle of the MQW show little variations with the change of RTA condition.
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