Abstract:BaTiO3 thin films with different thickness have been grown on Pt/Ti/SiO2/Si substrates by a modified sol–gel method. X-ray diffraction analyses show that the BaTiO3 thin films are polycrystalline. The crystalline quality of the films is improved with increasing thickness. The infrared optical properties of the BaTiO3 thin films have been investigated using an infrared spectroscopic ellipsometry in the wave number range of 800–4000 cm−1 (2.5–12.5 μm). By fitting the measured pseudodielectric functions with a three-phase model (Air/BaTiO3/Pt), and a derived classical dispersion relation for the thin films, the optical constants and thicknesses of the thin films have been simultaneously obtained. The refractive index of the BaTiO3 thin films increases and on the other hand, the extinction coefficient does not change with increasing thickness in the entirely measured wave number range. The dependence of the refractive index on the film thickness has been discussed in detail and was mainly due to both the crystalline quality of the films and packing density. Finally, the absorption coefficient was calculated in the infrared region for applications in the pyroelectric IR detectors.

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