Effects of 90 keV proton irradiation on chemical structure of Kapton H film

Li Chundong,Shi Feizhou,Yang Dezhuang,He Shiyu
2009-01-01
Abstract:In this paper,the effects of 90 keV proton irradiation on chemical structure of Kapton H film are investigated.X-ray photoelectron spectroscopy(XPS) analysis results show that the low energy electron irradiation induces the break of C-N and C-O bands in Kapton H film molecular structure,the break of C = O bands and the recombination,while,some broken bands can cross thelinkage again.The number of C -N and C = O bands decreases with increasing electron irradiation energy in Kapton H film molecular structure.The surface hardness of Kapton H film increases after irradiated by 90 keV protons due to the break of C-O bands as flexible structures,and the generation of cross linkage structures and three-dimensional reticulated structures with benzene ring as the main component.
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