Amplitude Control Method of Magnetic Flux Vertical Modulation Structure for TMR Magnetic Sensor Based on Harmonic Component of Modulated Signal
Junsheng Zhang,Mengchun Pan,Qingfa Du,Jiafei Hu,Kun Sun,Yang Yu,Xinmiao Zhang,Huihui Luo
DOI: https://doi.org/10.3390/mi12060722
IF: 3.4
2021-06-19
Micromachines
Abstract:Magnetic flux vertical modulation method based on piezoelectric resonance can reduce the 1/f noise of tunnel magnetoresistance (TMR) magnetic sensor and significantly improves the low-frequency magnetic field detectivity. However, the amplitude variation of the modulation structure will lead to the instability of the sensor output. In order to improve the amplitude stability of the modulation structure, an amplitude control method based on the amplitude ratio of the first and second harmonic components of the modulated signal was proposed. Compared with the piezoelectric or capacitive feedback method, this method does not require an independent amplitude conversion circuit, and has the advantages of simple structure, high control efficiency and strong anti-interference ability. The experimental results showed that the amplitude and temperature drift of the modulated structure was significantly suppressed, which is of great significance for enhancing the adaptability of the TMR magnetic sensor to the application environments.
chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied