Improvement of the Surface Wettability of Microstructures in the Electrolyte

Li Guangyang,Wang Hong,Tan Jiaojiao,Yang Zhuoqing,Yao Jinyuan,Ding Guifu

DOI: https://doi.org/10.3969/j.issn.1671-4776.2010.11.011

2010-01-01

Abstract:The sodium dodecyl sulfate(SDS)as a wetter and O2 plasma modification was investigated to enhance the wettability of microstructures in the nickel sulfamate electrolyte.The polarization curves of the nickel sulfamate electrolytes with different SDS concentrations were tested.The surface ingredients of photoresist were characterized during different modification time periods by Fourier transform infrared spectroscopy(FTIR).A new method was proposed to characterize the wettability of the microstructure.The experiment proves that the nickel deposition potential cannot be changed by the addition of SDS.According to the result of FTIR,the hydroxyl is introduced in the photoresist by O2 plasma modification to enhance the wettability of microstructure.The result shows that the microstructure array with the width of 50 μm and the depth to width ratio of 1 is exposed to O2 plasma modification for 5 s,and is completely infiltrated within 15 min by nickel sulfamate electrolyte with 0.5 kg/m3 SDS.