Low-loss 1/spl Times/2 Multimode Interference Wavelength Demultiplexer in Silicon-Germanium Alloy

BJ Li,GZ Li,EK Liu,ZM Jiang,J Qin,X Wang
DOI: https://doi.org/10.1109/68.759403
IF: 2.6
1999-01-01
IEEE Photonics Technology Letters
Abstract:A low-loss multimode interference wavelength demultiplexer for 1.3- and 1.55-/spl mu/m operations based on the silicon-germanium alloy material has been proposed and demonstrated. The device was fabricated by molecular beam epitaxy followed by lithography and plasma etching. The input/output facets were polished mechanically. The measured insertion losses are 4.29 and 4.28 dB and the extinction ratios are 25 and 22 dB at 1.3 and 1.55 /spl mu/m, respectively.
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