Abstract:Mode-division multiplexing (MDM) has been extensively exploited to expand the capacity of chip-scale optical interconnects, whereas high-volume manufacturing of on-chip mode (de)multiplexers is still full of challenges. In this paper, we analyze the fabrication errors (sidewall, width, height) of silicon mode (de)multiplexer and present two cases of fabrication-tolerant high-performance silicon mode (de)multiplexer. The presented mode (de)multiplexer could eliminate the mode mismatch and mode hybridization caused by the fabrication errors. When sidewall errors are 0 degrees, 5 degrees, width errors are 0, +/- 20, +/- 30 nm, and height errors are 0, +/- 10 nm, the designed fabrication-tolerant high-performance silicon mode (de)multiplexer can achieve low excess loss less than 2.5 dB and low inter-mode crosstalk less than -15 dB over a broad bandwidth from 1500 to 1600 nm. The obtained results provide an important guideline for designing fabrication-tolerant photonic integrated circuits on silicon platform, which could be applied to the prospective high-volume manufacturing and large-scale integration. (c) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement

Silicon Mode (de)multiplexers with Parameters Optimized Using Shortcuts to Adiabaticity.

Mode Multiplexers With Tapers Based On Shortcuts To Adiabaticity

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Ultra-compact Silicon Mode (de)multiplexer Based on Directional Couplers with Subwavelength Sidewall Corrugations

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Silicon Three-Mode (de)multiplexer Based on Cascaded Asymmetric Y Junctions.

Design of an Ultra-Broadband Silicon Mode (De)multiplexer

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Silicon Two-Mode Multi/demultiplexer Based on Tapered Couplers

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Experimental Demonstration of a Broadband Two-Mode Multi/demultiplexer Based on Asymmetric Y-junctions

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Three-port Mode-(De)interleaver in Silicon Waveguide

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Silicon Mode Multiplexer Processing Dual-Path Mode-Division Multiplexing Signals.

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Silicon TM-mode Multiplexer Based on Bridged Subwavelength Grating

Fundamental Analyses of Fabrication-Tolerant High-Performance Silicon Mode (De)multiplexer.

Broadband Silicon Four-Mode (de)multiplexer Using Subwavelength Grating-Assisted Triple-Waveguide Couplers