Superplastic Micro/nano-Formability of La60Al20Ni10Co5Cu5 Amorphous Alloy in Supercooled Liquid State

Y Saotome,T Hatori,T Zhang,A Inoue
DOI: https://doi.org/10.1016/s0921-5093(00)01593-8
2001-01-01
Abstract:La60Al20Ni10Co5Cu5 amorphous alloy exhibits an obvious glass transition phenomenon and supercooled liquid state over a wide temperature range. The present paper investigates the macroscopic deformation behavior and microscopic deformation behavior. On a macroscopic scale, the material exhibits a Newtonian viscous flow in a supercooled liquid state. An index of the microformability is also evaluated by the geometrical transferability of a die shape to the material. For this study, new microforging apparatus and V-grooved micro dies of (100) Si were fabricated by a silicon process. The V-groove dies are from 200nm to 2μm wide. The material exhibits superior formability on micrometer and nanometer scales and may possibly be applied to micromaterials for micro-electro-mechanical systems (MEMS).
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