Abstract:Two kinds of large-area ordered and highly tunable micro/submicro-nanopatterned surfaces in a complementary manner were successfully fabricated by elaborately combining block copolymer self-assembly and colloidal lithography. Employing a monolayer of polystyrene (PS) colloidal spheres assembled on top as etching mask, polystyrene-block-poly(2-vinylpyridine) (PS-b-P2VP) or polystyrene-block-poly(4-vinylpyridine) (PS-b-P4VP) micelle films were patterned into micro/submicro patches by plasma etching, which could be further transferred into micropatterned metal nanoarrays by subsequent metal precursor loading and a second plasma etching. On the other hand, micro/submicro-nanopatterns in a complementary manner were generated via preloading a metal precursor in initial micelle films before the assembly of PS colloidal spheres on top. Both kinds of micro/submicro-nanopatterns showed good fidelity at the micro/submicroscale and nanoscale; meanwhile, they could be flexibly tuned by the sample and processing parameters. Significantly, when the PS colloidal sphere size was reduced to 250 nm, a high-resolution submicro-nanostructured surface with 3-5 metal nanoparticles in each patch or a single-nanoparticle interconnected honeycomb network was achieved. Moreover, by applying gold (Au) nanoparticles as anchoring points, micronanopatterned Au arrays can serve as a flexible template to pattern bovine serum albumin (BSA) molecules. This facile and cost-effective approach may provide a novel platform for fabrication of micropatterned nanoarrays with high tunability and controllability, which are promising in the applications of biological and microelectronic fields.

Fabrication of Metallic Split-Ring Arrays for Metamaterials Using Silica Particle Templates Anchored on A Silicon Substrate

Fabrication of porous microrings via laser printing and ion-beam post-etching

Flexible and stackable terahertz metamaterials via silver-nanoparticle inkjet printing

Fabrication and Characterization of Large Area Metallic Nano-Split-Ring Arrays by Nanoimprint Lithography

Fabrication of Stereo Metallic Resonant Structures with Polymer Droplets As Template

Patterned Microstructure Array Fabrication By Using A Novel Standing Surface Acoustic Wave Device

Fabrication of Three Dimensional Split Ring Resonators by Stress-Driven Assembly Method.

Holographic formation of large area split-ring arrays for magnetic metamaterials

Optical Metamaterials at Near and Mid-Ir Range Fabricated by Nanoimprint Lithography

Ultra Sub-Wavelength Gigahertz Resonator for Constructing Silicon-Substrate Metamaterials

Highly Tunable Complementary Micro/Submicro-Nanopatterned Surfaces Combining Block Copolymer Self-Assembly and Colloidal Lithography.

Magnetic metamaterials by ion-implantation

Strategy for Realizing Magnetic Field Enhancement Based on Diffraction Coupling of Magnetic Plasmon Resonances in Embedded Metamaterials.

Fabricating 3D Metastructures by Simultaneous Modulation of Flexible Resist Stencils and Basal Molds

Stereo Metamaterial with Three Dimensional Meta-Atoms Fabricated by Programmable Stress Induced Deformation for Optical Modulation

Silica Λ-shape Wedge Arrays Fabrication and Interspace Tuning Via Hot Embossing and Sol–gel Replication

FABRICATION OF SILICON NANOARRAYS BY DIRECT NANOSPHERE LITHOGRAPHY

Fast Fabrication of Silver Helical Metamaterial with Single-Exposure Femtosecond Laser Photoreduction

Silica Λ-shape wedge arrays fabrication and interspace tuning via hot embossing and sol-gel replication

Metamaterial via Reconfi guration of Asymmetric Split-Ring Resonators