Research on magnetic sensor based on magnetic-film/tuning fork

ZENG Jie,WEN Yu-mei,LI Ping,LI Jian-zhong,ZHANG Xiao-hua
DOI: https://doi.org/10.3969/j.issn.1000-9787.2010.01.037
2010-01-01
Abstract:A tuning fork magnetic sensor structure is designed by using one chip magnetic-film compound with quartz tuning fork to settle the problem of low Q value in magnetic-electric lamination magnetic sensor.The static magnetic field is detected through measuring the change of resonant frequency or Q value.The compound position of film is analyzed using the finite element analysis.The most sensitive compound position is the top of the tuning fork side arm,and the experiment proof is proceed.Experiment result indicates that the measured Q value is better than measured frequency,the highest sensitivity of Q value is 119.471/mT,and the resolution of the magnetic field can reach 10-6T when the resolution of Q value is 1 and the Q value stability of tuning fork is 20×10-6,the Q value is about 2 000 at zero bias magnetic filed.
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