Study on Atomic Layer Deposition Preparation of Core-Shell Structured Nanometer Materials

Li Yong,Li Hui-Qi,Xia Yang,Liu Bang-Wu
DOI: https://doi.org/10.7498/aps.62.198102
IF: 0.906
2013-01-01
Acta Physica Sinica
Abstract:Monocrystal Pt nanoparticles, amorphous Al2O3 thin film, polycrystalline ZnO and TiO2 thin films were fabricated on black carbon nanoparticles by means of atomic layer deposition (ALD). Using high resolution transmission electron microscopy (HRTEM), X-ray photoelectron spectrometer (XPS), energy dispersive spectroscopy (EDS), We have characterized and analyzed the surface morphology, crystal structure and composition of the ranopasticles and thin filins. Results indicate that the ALD method is an ideal method to prepare core-shell stuctured nanometer materials. In addition, the reasons why the formation of ALD films with different crystal morphologies, such as monocrystal, amorphous, polycrystalline, were discussed.
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