Abstract:The micromachined gyroscope has the characteristics of small volume, small mass and low cost, but the high resolution can not be obtained in ordinary micromachined gyroscope, which restricts the further popularization of micromachined gyroscope. The micromachined gyroscope of electromagnetic levitated rotor (MGELR) has the working principle of conventional mechanical gyroscope and the suitability to mass-produce through micromachined technique. The micromachined gyroscope with high sensitivity is hopeful to be obtained through this way. In order to decrease the electromagnetic field coupling between different coils, the micromachined gyroscope of electromagnetic levitated rotor with new structure is brought forward in the paper. Controlling circuit is simplified in the new structure. In the paper, the working mechanism of this micromachined gyroscope is analyzed on the basis of electromagnetic field theory. Using the finite element analysis software, ANSYS5.6, the feasibility of new structure is proved. The influence of levitating coil width and its inner diameter on levitating force is concluded in the paper, and the optimum values are obtained. In the paper two types of stability coils, fork coil and arc coil, are compared, and the conclusion that the arc coil is good to the stable levitation of micro-rotor is obtained. Above all, the optimum design of levitating coil and stability coil of micromachined gyroscope of electromagnetic levitated rotor is carried out in the paper, and these provide principle for fabrication of this micromachined gyroscope.

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