Abstract:Using the complex image method (CIM), we have analyzed the frequency and temperature dependencies of substrate eddy currents for single-ended and differential spiral inductors on a lossy silicon substrate. From our analysis, we have derived a set of accurate closed-form expressions for calculating inductances and substrate losses due to substrate eddy currents. Here, we propose a frequency-dependent eleven-element equivalent circuit model based on these formulas. We established the validity of the model by comparing the simulated and measured results, which are in good agreement. Index Terms—Complex image method (CIM), differential inductor, eddy currents, greenhouse algorithm, inductor model. HE high operating frequencies, at which deep submicrom- eter and nano-scale CMOS devices are able to operate, have brought radio-frequency integrated circuits (RFICs) in the realm of CMOS making the quality factor of the on-chip spiral inductors a focus of intense research. The quality factor of the on-chip inductor is limited by the losses due to the finite conduc- tivity of the metal and the conducting silicon substrate. Non-per- fect metal wires used to form spiral inductors cause ohmic loss due to the non-zero resistance at low frequencies. Additionally the non-uniform current distribution in metal wires at high fre- quencies increases the losses and degrades the quality factor of inductors. This loss mechanism has been extensively studied as skin- and proximity-effect (1)-(12).

Temperature Effects on the Performance of On-Chip Spiral Inductors Used in RF(MM)ICs

PERFORMANCE TRENDS OF ON-CHIP SPIRAL INDUCTORS FOR RFICS

Model Description and Parameter Extraction of On-Chip Spiral Inductors for MMICs

Modelling On-Chip Circular Double-Spiral Stacked Inductors for RFICs

Global Performance Evaluation of Various On-Chip Square Spiral Inductors on Gaas Substrates

An Investigation of Temperature Effects with On-Chip Passive Components

Performance degradation of some on-chip finite-ground coplanar waveguide (FGCPW)-built passive devices at high temperature

Electromagnetic-Thermal Analysis for Inductances and Eddy Current Losses of On-chip Spiral Inductors on Lossy Silicon Substrate

A Compact Circuit Model of On-Chip Multi-layer Spiral Inductors on Silicon Substrate

Analysis of Frequency- and Temperature-Dependent Substrate Eddy Currents in On-Chip Spiral Inductors Using the Complex Image Method

Experimental Characterisation Of On-Chip Octagonal Double-Helix Inductors On Silicon Substrates

Electrical Characteristics and Behavioral Model of Spiral Inductors On Gaas Substrate

A derived circuit model for spiral inductors on lossy silicon substrate

A Novel Compact Model for On-Chip Vertically-Coiled Spiral Inductors

The enhancement of Q factor for patterned ground shield inductors at high temperatures

The Enhancement Of Q-Factor Of Planar Spiral Inductor With Low-Temperature Annealing

Fabrication and Performance of Novel RF Spiral Inductors on Silicon

Physical Models of Planar Spiral Inductor Integrated on the High-Resistivity and Trap-Rich Silicon-on-Insulator Substrates

High Performance MEMS Spiral Inductors

Distributed Characterization of On-Chip Spiral Inductors for Millimeter- Wave Frequencies

Coupling Effects Between On-Chip Inductors in the Millimeter-Wave Regime