Design and Fabrication of Sub-Wavelength Metal Wire-Grid and Its Application to Experimental Study of Polarimetric Imaging

Kang Guo-Guo,Tan Qiao-Feng,Chen Wei-Li,Li Qun-Qing,Jin Wei-Qi,Jin Guo-Fan
DOI: https://doi.org/10.7498/aps.60.014218
IF: 0.906
2011-01-01
Acta Physica Sinica
Abstract:Metal wire-grid whose period is far less than the illuminating wavelength exhibits strong polarization selectivity within a large field of view over a wide wave length range. Thus it could be used as the polarization-controller in the polarimetric imaging system. For infrared polarimetric imaging system, an aluminum wire-grid on the CaF substrate with period of 200nm and depth of 100nm was designed based on effective medium theory. The calculation results demonstrate that the designed wire-grid has the extinction ratio larger than 35 dB within a field of view ±20° over both middle wave infrared (MWIR) (3—5 μm) and long wave infrared (LWIR) (8—12 μm). The aluminum wire-grid was fabricated by electron beam lithography, reactive ion etching and plasma stripping. A clear-cut polarimetric image was obtained when wire-grid was placed in front of a MWIR thermal infrared imager.
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