Study on key technology for 3-D galvanometric scanners

WEN Shi-feng,SHI Yu-sheng,XIE Jun,CAI Dao-sheng
DOI: https://doi.org/10.3969/j.issn.1001-3806.2009.04.012
2009-01-01
Abstract:In order to design a 3-D galvanometric scanner with a large working field,its dynamic response capability,control algorithm and calibration algorithm were studied in detail. After selecting a servo motor with high dynamic response as the executive unit of the scanner,optimizing the scanning path and delay parameters,a 3-D scanner was developed successfully. A precise calibration model was designed to calibrate the scan image. This set of scanner was validated with it running for a long time. The scanner worked stably with repeating location precision of ≤30μm and scanning precision of 100mm ±0.1mm. The results show that the 3-D scanner has important application in large scanning fields.
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