Growth of Pure Zinc Blende P-Type GaAs Nanowires by Metal-Organic Chemical Vapor Deposition

李然,黄辉,任晓敏,郭经纬,刘小龙,黄永清,蔡世伟
DOI: https://doi.org/10.1088/1674-4926/32/5/053003
2011-01-01
Journal of Semiconductors
Abstract:>Vertical p-type gallium arsenide(GaAs) nanowires with pure zinc blende structure were grown on GaAs (111) B substrate by metal-organic chemical vapor deposition via a Au-catalyst vapor-liquid-solid mechanism.The p-type doping was investigated by additional diethyl zinc(DEZn).In the highⅡ/Ⅲratio range(Ⅱ/Ⅲ>9.1%),there exists a critical length beyond which kinking takes place.Two possible reasons are discussed.Zn occurrence in the nanowires was verified by energy dispersive X-ray(EDX) analysis.Corresponding toⅡ/Ⅲ= 0.2%,the doping concentration is about 8×10 18 cm -3 .
What problem does this paper attempt to address?