Ratio of the mean secondary electron generation of backscattered electrons to primary electrons at high electron energy

Ai-Gen Xie,Hao-Feng Zhao,Tie-Bang Wang
DOI: https://doi.org/10.1016/j.nimb.2009.12.026
2010-01-01
Abstract:Based on the main physical processes of secondary electron emission from metals, a formula for the number of secondary electrons released per primary electron was deduced, based on the condition that the backscattered electrons that diffuse back from the interior of the material follow a cosine distribution. The probability per unit solid angle of these backscattered electrons reaching the surface and being emitted into the vacuum at specific angles was deduced. Based on the probability and the main physical processes of secondary electron emission from metals, a formula for the number of secondary electron released per backscattered electron was deduced. Based on the definition of the ratio of the mean secondary electron generation of one backscattered electron to primary electron on metal at high electron energy, the ratio was deduced and proved experimentally. The results are discussed and it is concluded that the ratio is theoretically equal to two.
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