Abstract:Optical waveguides fabricated via femtosecond direct laser writing are covered in this review, which not only summarizes fabrication mechanisms, process parameters, material selection, and waveguide devices, etc., but also presents current challenges in integrated photonics. With a panoramic view of the development, it is concluded with insights and perspectives of the future development of optical waveguides and processing technology. As the most fundamental unit of photonic integration, optical waveguides offer the possibility of developing efficient and practical photonic chips by facilitating the on‐chip integration of devices with different functions. Femtosecond direct laser writing (FsDLW), as a burgeoning 3D microfabrication technology, can realize the rapid formation of arbitrary optical waveguides without any mask inside versatile materials, such as crystalline dielectric crystals, glasses, polymers, and photoresists. This significant material‐independence allows FsDLW to combine different materials and manufacturing processes to implement a cross‐platform solution. This review first describes the different optical loss types and suitable measurement methods for different applicable scenes, then summarizes the two fabrication mechanisms and points out the general direction for adjusting the waveguide properties by fabrication processes. Finally, the application fields and development prospects of different materials are discussed by overviewing the characteristics of different materials and the material selection preferences of different devices. With a panoramic view of the development, it is concluded with insights and perspectives of the future development of optical waveguides and processing technology via FsDLW.

Fabrication Of Fluorinated Polyimide Optical Waveguides By Micropen Direct Writing Technology

Fabrication of Polymer Optical Waveguides by Digital Ultraviolet Lithography

Synthesis and characterization of cross-linkable fluorinated polyimide for optical waveguide

Fabrication of Si/Si1-Xgex Waveguide Wdm Components

Synthesis and Characterization of Fluorinated Polyimide Doped with NaYF4 Nanocrystals for Optical Waveguide Applications

Fabrication Techniques For Polymer/Si Optical Waveguide

Development of Femtosecond Laser Direct-Writing Optical Waveguide Devices in Flexible PDMS

Simple Ultraviolet-Based Soft-Lithography Process for Fabrication of Low-Loss Polymer Polysiloxanes-Based Waveguides

Design and Fabrication of Inverted Ridge Waveguide Electro-Optic Modulator Based on PDMS Material

All-polymeric planar waveguide devices based on a gas-assisted thermal imprinting technique

Optical Waveguides Fabricated via Femtosecond Direct Laser Writing: Processes, Materials, and Devices

Direct Laser Writing of Strip Waveguide in Sol-Gel Film

Fabricated Technology for Polymer/si Arrayed Waveguide Grating

Sul-containing fluorinated polyimides for optical waveguide device

Simple UV-based Soft-lithography Process for Fabrication of Low-Loss Polymer PSQL-based Waveguides

Direct UV-written Highly Fluorinated Aromatic-Aliphatic Copolyethers for Optical Waveguides

Synthesis of crosslinkable fluorinated polyesters for optical waveguide devices

Fabrication of Single-Mode Circular Optofluidic Waveguides in Fused Silica Using Femtosecond Laser Microfabrication

Fabrication of long-range surface plasmon polaritons waveguide by wet chemical etching

Fabrication and Performance Evaluation of Polymer Waveguides for Optical Printed Circuit Board Applications

Dye-doped Polymeric Planar Waveguide Devices Based on a Thermal UV-bleaching Technique