Study on a PZT-actuated diaphragm pump for air supply for micro fuel cells

Xing Yang,Zhaoying Zhou,Hyejung Cho,Xiaobing Luo
DOI: https://doi.org/10.1016/j.sna.2005.12.021
2006-01-01
Abstract:This paper presents a micro diaphragm air pump actuated by PZT bimorphs for air supply for micro fuel cells. The pump is characterized by thin structure, large air flow rate, low power consumption, etc. A prototype of the micro diaphragm air pump, with a size of 60mm×16mm×2mm, was fabricated by precise manufacturing. Simulations and experiments showed that the diaphragm air pump has high efficiency and good performance. With a voltage of 20V, the air pump's flow rate is 85.3ml/min (the flow velocity is about 0.2m/s) in resonance and its power consumption is only 3.18mW.
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