Research Progress of Novel Oxide Semiconductor Gas Sensor

LIN Yutao,XU Tao,CHENG Dingfeng,LIU Qingju
2011-01-01
Abstract:Recently,the problem of declining air quality has aroused people′s concern.And,researchers deve-lop various gas sensors to monitor it.Among these sensors,oxide semiconductor gas sensor has its exceptional pro-perties such as high sensitivity,low cost and simple method of measurement.By now,it becomes the main product of gas sensor.The progress,gas-sensing mechanism,sensor structure and fabrication method of this kind of gas sensor are introduced and summarized,and also the problems and developing tendency are pointed out.
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