Abstract:Phase retrieval (PR) technology can reconstruct the complex amplitude information of the entrance pupil surface from the captured defocus intensity images, and has been successfully applied in many scientific fields such as astronomical observation, biomedical imaging and digital signal restoration. For low numerical aperture (NA) optical systems, the point spread function (PSF) can be calculated using the Fresnel diffraction propagation theory based on Fourier transform, ignoring the polarization field of the light field. However, for high-NA systems, the focal spot not only includes the transverse component, but also the longitudinal component accounts for a proportion that cannot be ignored, thus necessitating a vector model when calculating the PSF in the non-paraxial region. In this paper, the vector diffraction calculation model with arbitrary defocus distance based on the extended Nijboer-Zernike (ENZ) theory is established, which can characterize the light field components in three directions under the Cartesian coordinate system. What's more, a modified Gauss-Newton theory is innovatively applied to the axial phase difference PR model. Compared with the traditional first-order algorithm, the second-order algorithm can reduce the number of iterations. In addition, so as to verify the effectiveness of the proposed method, numerical simulations matching the physical model are carried out, the results show that the proposed method can accurately reconstruction the wavefront with high robustness. In conclusion, the established vector PR model in this paper would provide a creatively guidance for wavefront measurement of high-NA optical systems that is significant in the fields of semiconductor lithography, micro imaging and micro manipulation.

Phase Retrieval Based on Total Variation

Large-scale Phase Retrieval Method for Wavefront Reconstruction with Multi-Stage Random Phase Modulation

Non-propagation Fast Phase Diverse Phase Retrieval for Wavefront Measurement with Generalized FFT-based Basis Function.

Phase Retrieval with PhaseLift Algorithm

Application of Vector Phase Retrieval Model in High Numerical Aperture Optical Systems

Phase Retrieval in Arbitrarily Shaped Aperture with the Transport-of-intensity Equation

Complex Noise-Based Phase Retrieval Using Total Variation and Wavelet Transform Regularization

Phase Retrieval in the Fresnel Transform System: A Recursive Algorithm

Experimental verification of phase retrieval based on intensity transport equation

Variational Phase Imaging Using the Transport-of-Intensity Equation

A Phase Retrieval Algorithm for Complex Optical Field

Transport of intensity phase imaging from multiple intensities measured in unequally-spaced planes.

Transport of Intensity Equation: a New Approach to Phase and Light Field

Phase retrieval with the transport-of-intensity equation in an arbitrarily shaped aperture by iterative discrete cosine transforms.

A New Method For Phase Retrieval In The Optical System

Phase Retrieval Exact Solution Based on Structured Window Modulation Without Direct Reference Waves

Phase Retrieval by Tensor Total Least Squares.

Phase Retrieval with Iterative Compensation Based on the Transport-of-intensity Equation

Complete Transport of Intensity Equation for Phase Retrieval of Optical Vortex Beams

A NOVEL PHASE RETRIEVAL APPROACH FOR ELECTROMAGNETIC INVERSE SCATTERING PROBLEM WITH INTENSITY-ONLY DATA

Non-Interferometric Phase Retrieval and Quantitative Phase Microscopy Based on Transport of Intensity Equation: A Review