Study of Dielectric Breakdown Properties in 50%SF6-50%CF4 Mixtures at 1 Atm

ZHAO Hu,LI Xingwen,JIA Shenli,LIU Zhifang,DONG Qinxiao
DOI: https://doi.org/10.13334/j.0258-8013.pcsee.2013.19.024
2013-01-01
Abstract:The reduced critical electric field strength is an important indicator for the evaluation of dielectric breakdown of SF6 and its mixtures. The electron energy distribution function, reduced ionization coefficient and attachment coefficient of SF6-CF4 mixtures were obtained at 1atm and gas temperatures to 3000K, by two-term Boltzmann equation analysis. Then the reduced critical electric field strength could be determined. The results show that, at temperature above 1 800 K, the reduced critical electric field strength of 50%SF6-50% CF4 mixture is higher than SF6 gas; at temperature beyond 2600K, different from the cases in pure SF6 and SF6-N2 mixtures, due to the dissociation of CF4, the reduced critical electric field strength of 50%SF6-50%CF4 mixture increases with the temperature rising. In order to validate the calculation method and parameters, the reduced effective ionization coefficient and reduced critical electric field strength of SF6-CF4 mixtures under ambient temperature and 1 atm were calculated and compared with other literatures. The comparison results confirmed the validity of the presented calculation method and parameters.
What problem does this paper attempt to address?