Simulation of Electron/solid Interaction and Application to Quantitative Analysis by Electron Spectroscopies

S ICHIMURA,ZJ DING,R SHIMIZU
DOI: https://doi.org/10.1002/sia.740120218
1988-01-01
Surface and Interface Analysis
Abstract:Surface and Interface AnalysisVolume 12, Issue 2 p. 161-161 Extended Abstract Simulation of electron/solid interaction and application to quantitative analysis by electron spectroscopies S. Ichimura, S. Ichimura Electrotechnical Laboratory, 1–1–4, Sakura, Niihari, Ibaraki 305, Japan; and Osaka University, Yamada-oka 2–1, Suita Osaka 565, JapanSearch for more papers by this authorDing Ze-Jung, Ding Ze-Jung Electrotechnical Laboratory, 1–1–4, Sakura, Niihari, Ibaraki 305, Japan; and Osaka University, Yamada-oka 2–1, Suita Osaka 565, JapanSearch for more papers by this authorR. Shimizu, R. Shimizu Electrotechnical Laboratory, 1–1–4, Sakura, Niihari, Ibaraki 305, Japan; and Osaka University, Yamada-oka 2–1, Suita Osaka 565, JapanSearch for more papers by this author S. Ichimura, S. Ichimura Electrotechnical Laboratory, 1–1–4, Sakura, Niihari, Ibaraki 305, Japan; and Osaka University, Yamada-oka 2–1, Suita Osaka 565, JapanSearch for more papers by this authorDing Ze-Jung, Ding Ze-Jung Electrotechnical Laboratory, 1–1–4, Sakura, Niihari, Ibaraki 305, Japan; and Osaka University, Yamada-oka 2–1, Suita Osaka 565, JapanSearch for more papers by this authorR. Shimizu, R. Shimizu Electrotechnical Laboratory, 1–1–4, Sakura, Niihari, Ibaraki 305, Japan; and Osaka University, Yamada-oka 2–1, Suita Osaka 565, JapanSearch for more papers by this author First published: July 1988 https://doi.org/10.1002/sia.740120218AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL No abstract is available for this article. Volume12, Issue2July 1988Pages 161-161 RelatedInformation
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