Abstract:In this work, the research progress of microchannels of transparent hard materials processed by femtosecond laser in reaction mechanism, processing method, and applications (including optical inspection and biochemical reaction in microfluidic field) is reviewed. Furthermore, some solutions to the challenges of femtosecond laser processing microchannels in transparent hard materials are proposed and the future prospects can be foreseen. The excellent characteristics of transparent hard materials such as high hardness, high transparency, corrosion resistance, and high temperature resistance enable their applications in microfluidic substrates even in harsh environments. Microchannels are important parts in microfluidic systems, and the preparation of microchannel structures in transparent hard materials deserves further in‐depth study. The traditional processing method is contact processing with large thermal influence and low processing efficiency, so it is impossible to obtain complex microchannels with high quality and high aspect ratio. The femtosecond laser processing is a non‐contact processing approach with no thermal damage, high processing accuracy, and easy to form complex microchannels, making it the best choice for processing microchannels in transparent hard materials. This work reviews the recent advances in femtosecond laser processing of transparent hard materials to form microchannel structures, focusing on the reaction mechanism, processing methods, and the obtained microchannel structures, including surface microchannels, 2D microchannels, and 3D microchannels. Furthermore, the application of microchannel structure in microfluidic field, including optical inspection and biochemical reaction, is also described.

Femtosecond Laser-Induced Modification of Surface Wettability of PMMA for Fluid Separation in Microchannels

Study on the influence of Fs-laser power on the entrance morphology of vessel microfluidic chips

Tailoring the wetting properties of polymers from highly hydrophilic to superhydrophobic using UV laser pulses

Experimental Research on CO_2 Laser Direct-writing Machining PMMA Microchannel

Picosecond laser processing super-wetting surfaces with hierarchical structures for passive driving of microfluidics

Femtosecond laser pulse inducing hydrophilicty and hydrophobicity on polycarbonate surfaces

Fabrication of microchannels by space-selective control of phase separation in glass.

Experimental Investigation and Optimization of Laser Induced Plasma Micromachining Using Flowing Water

Study of surface wettability on fused silica by ultrafast laser-induced micro/nano-surface structures

Femtosecond Laser Fabrication of Microchannels in Transparent Hard Materials

Laser-Induced Bubble Dynamics Optimization for High-Aspect-Ratio 3D Micro-Fluidic Channels Fabrication

High-profile-quality microchannels fabricated by UV picosecond laser for microfluidic mixing

Femtosecond Laser Thermal Accumulation-Triggered Micro-/Nanostructures with Patternable and Controllable Wettability Towards Liquid Manipulating

Femtosecond and picosecond laser fabrication for long-term superhydrophilic metal surfaces

Molding Wetting by Laser-Induced Nanostructures

Femtosecond laser processed superhydrophobic surface

Enhancement of flow boiling heat transfer by laser-induced periodic surface structures using femtosecond laser

Channel-controlled Janus Membrane Fabricated by Simultaneous Laser Ablation and Nanoparticles Deposition for Underwater Bubbles Manipulation

High-quality Microhole Arrays by Water-Assisted Femtosecond Laser Perforating for Improved Particle Sorting

Femtosecond laser-induced surface wettability modification of polystyrene surface

Investigations of the Laser Ablation Mechanism of PMMA Microchannels Using Single-Pass and Multi-Pass Laser Scans