Developments of New Preparation Method for Insulation Material with High Dielectric Properties

LI Bin,DAN Min,GUO Ai-bo,LIU Yu-ping,CHEN Feng,LIU Ming-hai,HU Xi-wei
DOI: https://doi.org/10.3969/j.issn.1009-9239.2006.05.004
2006-01-01
Abstract:The status quo in studying new insulating materials used for capacitors was summarized.A new method,low-temperature plasma technology for improving dielectric properties of insulating materials is introduced.Discussion is started from chemical activities of low-temperature plasma,focusing on different plasma technologies in preparing and modifying insulating materials and prospect of these technologies.
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