In-Situ Production Of Epitaxial Ba1-Xkxbio3 Thin-Films By High-Oxygen-Pressure Rf-Sputtering

P. Prieto,U. Poppe,W. Evers,R. Hojczyc,C.L. Jia,K. Urban,K. Schmidt,H. Soltner
DOI: https://doi.org/10.1016/0921-4534(94)90763-3
1994-01-01
Abstract:Epitaxial thin films of the superconductor Ba1-xKxBiO3 (BKBO) have been prepared on SrTiO3, MgO, and LaAlO3 by a high-pressure planar RF sputtering technique. The films grown at substrate temperatures of 400-440 degrees C in pure oxygen at pressures between 3.0 and 3.5 mbar showed critical temperature transitions above 28 K with resistivity transition widths down to 0.3 K and critical current densities of about 10(6) A/cm(2) at 4.2 K without postannealing treatments. X-ray diffraction measurements and high-resolution electron microscopy observations show that the films are mostly (001) oriented on all substrates with rather good epitaxial growth, as determined by channeling measurements with He ions.
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