Optimization of S-curve intensity control model for laser direct writing

Zhan-lei JIN,Jiu-bin TAN,Shan ZHANG,Lei WANG,Yun-fei L(U)
DOI: https://doi.org/10.3321/j.issn:1004-924X.2008.04.002
2008-01-01
Optics and Precision Engineering
Abstract:An optimization method of S-curve intensity control model was propoded for further im provement of joint quality during laster direct writing.On the basis of analyzing the effect of the Scurve parameter varation on the joint quality,the optimized interrelationship of the radian and the radius R used in the control model was established consdering in to be optimial when the exposure does distribution gor an extremum at one point. The joint length after optimization can be simply determined by the radian Φ,and is just twice as long as that of using slope-line control method.The experimental results are consistent with the theoretical analysis,and indicate that the proposed optimization method can further increase the valid transition area length and can reduce the variation rate of exposure dose distribution at the joint area.Therefore the proposed method improves the joint quality as well as guarantees the writing efficiency.
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