Super-plastic forming process of Zr-based bulk metallic glass

廖广兰,王俊,喻强,朱志靖
2011-01-01
Abstract:Super-plastic micro-forming process of bulk metallic glasses Zr41.25Ti13.75Ni10Cu12.5Be22.5 utilizing micro silicon molds was investigated,where the micro silicon molds were fabricated by inductively coupled plasma etching.The super-cooled liquid region,360~440 ℃,was measured by differential scanning calorimeter.Micro components were thermoformed in the super-cooled liquid region.The flash of micro components was removed by mechanical grinding,and the silicon molds were resolved with 40% KOH.Forming equipment was developed on the basis of the super-plastic process,and the temperature-control was solved by simulation analysis and experiments.Subsequently,the forming results in different temperatures were analyzed,which confirmed the simulation results.Finally,an internal gear with 0.03 module,66 teeth and 500 μm thickness was obtained with good dimensional accuracy at 410 ℃.The gear had a relatively good profile with an amorphous structure proved by X-ray diffraction scanning,which substantiated the feasibility of the process.
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