DFB Gratings for Semiconductor Laser Diodes by Nanoimprint Lithography

Wang Dingli,Zhou Ning,Wang Lei,Liu Wen,Xu Zhimou,Shi Jing
DOI: https://doi.org/10.3969/j.issn.1671-4776.2010.01.012
2010-01-01
Abstract:The fabrication of distributed feedback(DFB) gratings is a key process for semiconductor laser chips.The DFB gratings were fabricated on the photoresist on the InP substrate surface,and the grating patterns were transferred to the InP substrate by wet and dry etching process respectively.The period of the DFB grating is 240 nm(corresponding to 1 550 nm wavelength DFB lasers),and a λ/4 phase-shift is located in the center of the grating.Compared with the double-light beam interfering method,the DFB gratings fabricated by nanoimprint lithography have better uniformity and lower line roughness,and the technical problem that the non-uniform gratings are not fabricated by double-light beam interfering method is solved.Com-pared with the electron beam direct writing lithography,the DFB gratings fabricated by nanoimprint lithography have advantages of rapidity and low cost.The DFB gratings with phase-shift structures are successfully fabricated on InP substrates by nanoimprint lithography,which lay a good foundation for further fabricating semiconductor laser chips of low cost and high performance.
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