Investigation on Strain-Sensing Suspended Single-Walled Carbon Nanotube Arrays

Fu-Zhong Zheng,Zhao-Ying Zhou,Xing Yang,Yi-Ke Tang,Ying Wu
DOI: https://doi.org/10.1109/tnano.2010.2068559
2011-01-01
IEEE Transactions on Nanotechnology
Abstract:An electromechanical system is constructed to explore the electrical properties of well-aligned horizontal suspended single-walled carbon nanotube (SWCNT) arrays under the influence of tensile stretching. The suspended SWCNT array sensing structure consists of a well-grown SWCNT array suspended between two separated metal electrodes on top of a silicon (Si) wafer with 500-nm-thick thermal oxide layer. Sensor properties are explored in linear region, including sensitivity (gauge factor ~248), linearity (better than 99%), and hysteresis. Results show that the suspended SWCNT array devices have potential application as strain gauges due to their high sensitivity.
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