Fabrication and characterization of nano-scale lines through anodic porous alumina membrane

Guo Q. Han,Zhuang D. Jiang,Wei X. Jing,Hai R. Wang,Guo L. Sun,Ming Z. Zhu

DOI: https://doi.org/10.1109/NEMS.2009.5068680

2009-01-01

Abstract:Anodic Porous alumina membranes are fabricated with different pore sizes through second oxide technique by changing the acid electrolyte and the anodization voltage. The pore diameter value and interpore distance are evaluated through SEM images. Nanostructure patterns with nanometer scale lines can be obtained on the cleaved cross-section of porous alumina membrane. Nano CD (NCD) linewidth standard product lines are prepared in this way. The linewidth roughness (LWR) and line edge roughness (LER) have been evaluated by analyzing top-down scanning electron microscope (SEM) images off-line using image processing and analysis technology. The average linewidth is less than 40 nm and the LWR and LER are estimated.