Design and Simulation of a Novel Bridge-Like Coplanar Waveguide for Microelectromechanical Systems

Xiaofeng Sun,Guifu Ding,Hong Wang,Zhenxin Jiang,Binhong Li,Minyi Shen
DOI: https://doi.org/10.1007/s00542-007-0395-0
2007-01-01
Microsystem Technologies
Abstract:In this paper, a kind of novel bridge-like coplanar waveguide has been designed and simulated at 10 GHz. Compared with conventional CPW, this design has lower attenuation and wider available characteristic impedance range. In addition, this design can avoid the interference among the adjacent components of RF MEMS devices.
What problem does this paper attempt to address?