Abstract:Superconducting coplanar waveguide (CPW) microwave resonators in quantum circuits are the best components for reading and changing the state of artificial atoms because of their excellent coupling to quantum systems. This coupling forms the basis of the developing circuit quantum electrodynamic architecture. In quantum processors, oscillators are used to store and transmit quantum information using microwave-frequency wave packets. However, the presence of amorphous thin-film defects is deleterious and can result in an irrevocable loss of coherent information with uncontrolled degrees of freedom. Although there has been extensive research into techniques to reduce the coherent loss of such devices, the precise structure of amorphous dielectric layers on surfaces and interfaces and their associated loss mechanism are being actively studied. In particular, planar superconducting resonators are very sensitive to defects on their surfaces, such as two-level systems in oxidized metals and nonequilibrium quasiparticles, making these devices suitable probes for the different loss mechanisms. In this work, we present the design, fabrication, and characterization of Nb CPW resonators with different surface treatments with self-assembled monolayers (SAMs), which mitigate the growth of oxides in superconducting circuits. We demonstrate SAM-passivated resonators having internal quality factors of greater than 106 at a single-photon excitation power (measured at 100 mK), which were probed using scanning electron microscopy, X-ray photoelectron spectroscopy, and transmission electron microscopy to demonstrate the efficiency of our surface treatment. Finally, we compared the improvements in the experimental quality factors to those obtained by numerical simulation.

Fabrication of Al air-bridge on coplanar waveguide

Fabrication and characterization of low loss niobium airbridges for superconducting quantum circuits

Experimental Demonstrations of High-Q Superconducting Coplanar Waveguide Resonators

Fabrication of Airbridges with Gradient Exposure

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High-Q trenched aluminum coplanar resonators with an ultrasonic edge microcutting for superconducting quantum devices

Tunable coplanar waveguide resonator with nanowires

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On‐Chip Tightly Confined Guiding and Splitting of Surface Acoustic Waves Using Line Defects in Phononic Crystals

Lower-temperature fabrication of airbridges by grayscale lithography to increase yield of nanowire transmons in circuit QED quantum processors

A Novel Meandered Coplanar Waveguide for RF Microelectromechanical Systems

High speed surface acoustic wave and laterally excited bulk wave resonator based on single-crystal non-polar AlN film

Single and Double Superconducting Coplanar Waveguide Resonators

Design and Fabrication of a New Micromachined Interdigital Coplanar Waveguide

Design and Fabrication of Indium Phosphide Air-Bridge Waveguides with Mems Functionality

Planar Superconducting Whispering Gallery Mode Resonators

New Micromachined Interdigital Coplanar Waveguide

Highly stable aluminum air-bridges with stiffeners

Surface Passivation of Niobium Superconducting Quantum Circuits Using Self-Assembled Monolayers

Analysis and mitigation of interface losses in trenched superconducting coplanar waveguide resonators

Crosstalk Between Nb Superconducting Coplanar Waveguide Resonators