Influence of Coulomb interactions on current density distribution in a two-lens focused ion beam system

J. Bi,P. W. H. de Jager,J. E. Barth,P. Kruit
DOI: https://doi.org/10.1016/S0167-9317(98)00057-4
IF: 2.3
1998-01-01
Microelectronic Engineering
Abstract:Focused ion beam systems equipped with a liquid metal ion source suffer strongly from the Coulomb interactions between ions. The Coulomb interactions not only deteriorate the probe size, but also cause a wider tail on the current density distribution. In this paper we theoretically and experimentally investigate what role the Coulomb interactions play in the tail of the current density distribution.
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