Thin film lithium niobate electro-optic modulator with reduced half-wave voltage length product through design

Ye Li,Lihong Hong,Baoqin Chen,Zhi-Yuan Li

DOI: https://doi.org/10.1364/ao.540599

IF: 1.9

2024-10-31

Applied Optics

Abstract:Ye Li, Lihong Hong, Baoqin Chen, Zhi-Yuan Li This paper aims at shortening electrode spacing in a thin film lithium niobate (TFLN) electro-optic modulator (EOM) while avoiding an ... [Appl. Opt. 63, 8257-8262 (2024)]

optics

What problem does this paper attempt to address?

Wideband Thin-Film Lithium Niobate Modulator with Low Half-Wave-voltage Length Product

Xuecheng Liu,Bing Xiong,Changzheng Sun,Jian Wang,Zhibiao Hao,Lai Wang,Yanjun Han,Hongtao Li,Jiadong Yu,Yi Luo

DOI: https://doi.org/10.3788/col202119.060016

IF: 2.56

2021-01-01

Chinese Optics Letters

Abstract:A novel thin-film lithium niobate (TFLN) electro-optic modulator is proposed and demonstrated. LiNbO3-silica hybrid wave guide is adopted to maintain low optical loss for an electrode spacing as narrow as 3 mu m, resulting in a low half-wave-voltage length product of only 1.7 V.cm. Capacitively loaded traveling-wave electrodes are employed to reduce the microwave loss, while a quartz substrate is used in place of a silicon substrate to achieve velocity matching. The fabricated TFLN modulator with a 5-mm-long modulation region exhibits a half-wave voltage of 3.4 V and a merely less than 2 dB roll-off in an electro-optic response up to 67 GHz.
Thin Film LiNbO3 Modulator Based on LiNbO3-Silica Hybrid Waveguide with Narrow Electrode Gap

Xuecheng Liu,Bing Xiong,Changzheng Sun,Zhibiao Hao,Lai Wang,Jian Wang,Yanjun Han,Hongtao Li,Yi Luo

DOI: https://doi.org/10.23919/mwp48676.2020.9314510

2020-01-01

Abstract:A novel thin-film lithium niobate (TFLN) electro-optic modulator with low half-wave-voltage length product is designed and fabricated. LiNbO 3 -Silica hybrid waveguide is adopted to achieve an electrode gap as narrow as 3 μm without deterioration of optical transmission, resulting in a high electric field loading efficiency and a low half-wave-voltage length product. Furthermore, periodically loaded T-rail electrodes are employed to ensure a large modulation bandwidth. Experiment results show a half-wave-voltage length product as low as 1.8 V·cm. RF performance has also been preliminarily verified and the device is expected to achieve a large modulation bandwidth.
Ultra-high Efficiency Electro-optic Modulator on Thin-film Lithium Niobate

N. Chen,Y. Yu,K. Lou,T. Chu

DOI: https://doi.org/10.23919/moc58607.2023.10302829

2023-01-01

Abstract:We propose a thin-film lithium niobate electro-optic modulator with ultra-high modulation efficiency by incorporating optical isolation trenches, which enables closer electrode placement and situates the optical waveguide within a more potent electric field. The proposed modulator achieves a record 1.2 V$\cdot$ cm efficiency while maintaining a wide electro-optic bandwidth.
Compact low-half-wave-voltage thin film lithium niobate electro-optic phase modulator fabricated by photolithography-assisted chemo-mechanical etching (PLACE)

Lang Gao,Youting Liang,Jinming Chen,Jianping Yu,Jia Qi,Lvbin Song,Jian Liu,Zhaoxiang Liu,Zhiwei Fang,Hongxin Qi,Ya Cheng

DOI: https://doi.org/10.1364/ol.538158

IF: 3.6

2024-10-05

Optics Letters

Abstract:Lang Gao, Youting Liang, Jinming Chen, Jianping Yu, Jia Qi, Lvbin Song, Jian Liu, Zhaoxiang Liu, Zhiwei Fang, Hongxin Qi, Ya Cheng We present a compact dual-arm thin-film lithium niobate (TFLN) electro-optic phase modulator fabricated using the photolithography-assisted ... [Opt. Lett. 49, 5783-5786 (2024)]

optics
High-efficiency Thin-Film Lithium Niobate Modulator with Highly Confined Optical Modes

Nuo Chen,Yalong Yu,Kangping Lou,Qingjiao Mi,Tao Chu

DOI: https://doi.org/10.1364/ol.481827

2023-01-01

Abstract:We demonstrate a low-loss, high-efficiency lithium niobate electro-optic (EO) modulator with optical isolation trenches to achieve stronger field confinement and reduced light absorption loss. The proposed modulator realized considerable improvements, including a low half-wave voltage-length product of 1.2 V center dot cm, an excess loss of similar to 2.4 dB, and a broad 3-dB EO bandwidth of over 40 GHz. We developed a lithium niobate modulator with, to the best of our knowledge, the highest reported modulation efficiency of any Mach-Zehnder interferometer (MZI) modulator. (c) 2023
High-efficiency Electro-Optic Modulators in Lithium Niobate on Insulator

Nuo Chen,Yalong Yu,Kangping Lou,Xuanjian He,Qingjiao Mi,Ying Huang,Hengsong Yue,Tao Chu

DOI: https://doi.org/10.1364/iprsn.2023.ith2b.1

2023-01-01

Abstract:We propose two novel methods to enhance the modulation efficiency of thin-film lithium niobate electro-optic modulators. The proposed modulator achieves a modulation efficiency of 1.2 V∙cm, while maintaining a broad EO bandwidth.
Low Half-wave-voltage Thin Film LiNbO3 Electro-optic Modulator Based on a Compact Electrode Structure

Xuecheng Liu,Bing Xiong,Changzheng Sun,Zhibiao Hao,Lai Wang,Jian Wang,Yanjun Han,Hongtao Li,Jiadong Yu,Yi Luo

DOI: https://doi.org/10.1364/acpc.2020.m4a.144

2020-01-01

Abstract:A novel compact electrode structure with LiNbO3-Silica hybrid waveguide is proposed to enhance electro-optical interaction in thin film LiNbO3 modulator, resulting in both a large bandwidth and a low half-wave-voltage length product of 1.5 V·cm.
Compact low-half-wave-voltage thin film lithium niobate electro-optic phase modulator fabricated by photolithography assisted chemo-mechanical etching

Lang Gao,Youting Liang,Jinming Chen,Jianping Yu,Jia Qi,Lvbin Song,Jian Liu,Zhaoxiang Liu,Hongxin Qi,Ya Cheng

2024-06-13

Abstract:This paper presents a compact dual-arm thin film lithium niobate (TFLN) electro-optic phase modulator fabricated using the photolithography-assisted chemo-mechanical etching (PLACE) technique. The design of the device allows for complete utilization of the microwave electric field, doubling the modulation efficiency compared to single-arm modulators in theory. With a half-wave voltage of approximately 3 V and a modulation length of 1 cm, the device outperforms conventional phase modulators. Furthermore, the phase modulator exhibits low sensitivity to optical wavelengths in the range of 1510-1600 nm and offers a low insertion loss of 2.8 dB. The capability to generate multiple sideband signals for optical frequency comb applications is also demonstrated, producing 29 sideband signals at an input microwave power of 2 W.

Optics,Applied Physics
High-performance thin-film lithium niobate electro-optic modulator based on etching slot and ultrathin silicon film

Yi Wang,Yin Xu,Bo Zhang,Yue Dong,Yi Ni

DOI: https://doi.org/10.1364/AO.482202

2023-03-01

Abstract:An electro-optic modulator (EOM) is an indispensable component to connect the electric and optical fields. Here, we propose a high-performance, thin-film lithium niobate-based EOM, where the modulation waveguide is formed by an etching slot on the lithium niobate film and the deposit of an ultrathin silicon film in the slot region. Therefore, a small mode size and high mode energy can be simultaneously achieved in the LN region with a high EO coefficient, which will be beneficial to increase the EO overlap and gradually decrease in the mode size. Further, we employed a waveguide structure to construct a typical Mach-Zehnder interference-type EOM. According to the requirements of high-speed traveling wave modulation, we conduct the index matching, impedance matching, and low-loss operation. From the results, the key half-wave voltage length product and 3 dB modulation bandwidth are, respectively, 1.45 V cm and 119 GHz in a modulation length of 4 mm. Moreover, a larger 3 dB bandwidth also can be achieved by shortening the modulation length. Therefore, we believe the proposed waveguide structure and EOM will provide new ways to enhance the performance of LNOI-based EOMs.
Thin Film Lithium Niobate Electro-optic Modulator Based on a Slow Wave Structure

Xuecheng Liu,Bing Xiong,Changzheng Sun,Zhibiao Hao,Lai Wang,Jian Wang,Yanjun Han,Hongtao Li,Jiadong Yu,Yi Luo

DOI: https://doi.org/10.1364/cleopr.2020.c4c_3

2020-01-01

Abstract:We propose a thin film lithium niobate modulator based on photonic crystal waveguide and slow wave electrodes. Simulations predict a low half-wave voltage of 2 V as well as an ultrawide-bandwidth over 200 GHz.
Study on Low Half-wave Voltage Electro-optic Modulator Based on Lithium Niobate

Shuo CHEN,Zhanyuan LIU,Xiaochen NIU,Xuepeng LI,Kaixin CHEN

DOI: https://doi.org/10.16818/j.issn1001-5868.2017.03.008

2017-01-01

Abstract:This paper focuses on lowering the half-wave voltage of lithium niobate (LN) electro-optic modulator.The principle of realizing the low half-wave voltage by the reflection structure is investigated.A reflection type electro-optic modulator is proposed and fabricated with x-cut LN crystal through the annealed proton-exchanged process.Preliminary results prove that the proposed reflection type LN electro-optic modulator can lower the half-wave voltage without increasing the length of device.
Design and Analysis of Lithium Niobate Electrooptic Modulators with T-Type Electrode

Jiayu Yang,Haiou Li,Shifeng Xie

DOI: https://doi.org/10.1109/CSRSWTC60855.2023.10427489

2023-01-01

Abstract:A highly electro-optically limiting modulation structure based on T-electrodes and thin films of lithium niobate was developed, which achieves a half-wave voltage close to 1.4 V at a modulation length of 1 cm. To verify the advantage of the design in the low half-wave voltage, optical and electrical simulations were carried out and the influence of the metal electrode structure on the operation of the electro-optical modulator was analyzed. Finally, the optimized high-performance structure is summarized. This research has important guiding significance for the design of electro-optic modulators.
Ultra-compact Thin Film Lithium Niobate Electro-optic Modulator with Metal-filled Photonic Crystal Waveguide

Xuecheng Liu,Bing Xiong,Changzheng Sun,Zhibiao Hao,Lai Wang,Jian Wang,Yanjun Han,Hongtao Li,Jiadong Yu,Yi Luo

DOI: https://doi.org/10.1364/acpc.2020.s4d.5

2020-01-01

Abstract:A novel thin film lithium niobate modulator with metal-filled photonic crystal is proposed to greatly enhance the electro-optical interaction. Half-wave-voltage of 2 V and bandwidth over 200 GHz can be realized with a 500-μm-long device.
Low half-wave-voltage, ultra-high bandwidth thin-film LiNbO3 modulator based on hybrid waveguide and periodic capacitively loaded electrodes

Xuecheng Liu,Bing Xiong,Changzheng Sun,Jian Wang,Zhibiao Hao,Lai Wang,Yanjun Han,Hongtao Li,Jiadong Yu,Yi Luo

2021-01-01

Abstract: A novel thin-film LiNbO3 (TFLN) electro-optic modulator is proposed and demonstrated. LiNbO3-silica hybrid waveguide is adopted to maintain low optical loss for an electrode spacing as narrow as 3 {\mu}m, resulting in a record low half-wave-voltage length product of only 1.7 V*cm. Capacitively loaded traveling-wave electrodes (CL-TWEs) are employed to reduce the microwave loss, while quartz substrate is used in place of silicon substrate to achieve velocity matching. The fabricated TFLN modulator with a 5-mm-long modulation region exhibits a half-wave-voltage of 3.4 V and merely 1.3 dB roll-off in electro-optic response up to 67 GHz, and a 3-dB modulation bandwidth over 110 GHz is predicted.
Polarization-Insensitive Electrooptic Modulation on Anisotropic Thin-Film Lithium Niobate

Xiaoyan Liu,Nuo Chen,Tao Chu

DOI: https://doi.org/10.1021/acsphotonics.4c00020

IF: 7

2024-01-01

ACS Photonics

Abstract:Lithium niobate (LN) is an ideal material for electrooptic (EO) modulation due to its strong EO effect. However, significant differences exist in the EO modulation efficiencies for different polarizations, given the anisotropy of LN. Here, we propose an innovative approach to mitigate the modulation polarization dependence of thin-film LN. We convert one of the orthogonal polarizations of the incident light to the higher-order mode of the other polarization and utilize mode-compatible components to achieve mode-independent signal processing, thereby converting the polarization issue into a mode issue and achieving polarization-independent signal processing. We also demonstrated a polarization-insensitive EO switch to validate this approach. The fabricated device demonstrates a low polarization-dependent loss of 0-2.4 dB across a 30 nm range (1260-1290 nm) and achieves the same modulation efficiency of 2.7 Vcm for TE and TM polarizations. The approach provides a robust solution to the EO modulation polarization dependence problem caused by the anisotropy in LN and other similar materials.
A Highly Compact Thin-film Lithium Niobate Modulator with Low Half-wave Voltage

Xuecheng Liu,Hao Liu,Bing Xiong,Changzheng Sun,Zhibiao Hao,Lai Wang,Jian Wang,Yanjun Han,Hongtao Li,Yi Luo

DOI: https://doi.org/10.1364/ofc.2022.th1j.6

2022-01-01

Abstract:Meandered thin-film lithium niobate modulators with capacitively loaded travelling-wave electrodes are demonstrated. Interdigitated T-rails are employed for reversed electric field, resulting in 1.08 V half-wave voltage and 3-dB bandwidth beyond 50 GHz for 8-mm-long devices. © 2022 The Author(s)
Low Half-wave Voltage Thin-film Lithium Niobate Modulator with Ultra-flat Electro-optic Response

Hao Liu,Xuecheng Liu,Bing Xiong,Changzheng Sun,Zhibiao Hao,Lai Wang,Jian Wang,Yanjun Han,Hongtao Li,Yi Luo

DOI: https://doi.org/10.1364/cleo_si.2022.sf4g.5

2022-01-01

Abstract:A thin-film lithium niobate modulator employing low-loss capacitively-loaded traveling-wave electrodes terminated by an on-chip resistor is demonstrated, with 6-dB electrical bandwidth over 150 GHz, ultra-flat electro-optic response and low half-wave voltage of 2 V.
Broadband Thin-Film Lithium Niobate Electro-Optic Modulator

Jinming Tao,Yinuo Yang,Xintong Li,Peng Wang,Jinye Li,Jianguo Liu

DOI: https://doi.org/10.3390/photonics11040325

IF: 2.536

2024-03-31

Photonics

Abstract:Recently, thin-film lithium niobate electro-optical modulators have developed rapidly and have become the core solution for the next generation of electro-optical problems. Compared with bulk lithium niobate modulators, these modulators not only retain the advantages of lithium niobate materials, such as low loss, high extinction ratio, high linear response and high optical power handling capabilities, but can also effectively improve some performance parameters, such as the voltage bandwidth performance of the modulator. Unfortunately, the extremely small electrode gap of thin-film lithium niobate EO (electro-optic) modulators causes metal absorption, resulting in higher microwave losses. The electro-optical performance of the modulator, thus, deteriorates at high frequencies. We designed traveling-wave electrodes with microstructures to overcome this limitation and achieve a 3 dB electro-optical bandwidth of 51.2 GHz. At the same time, we maintain low on-chip losses of <2 dB and a high extinction ratio of 15 dB. It is important to note that the devices we manufactured were metal-encapsulated and passed a series of reliability tests. The success of this modulator module marks a key step in the commercialization and application of thin-film lithium niobate modulation devices.

optics
Dual-layer capacitance-loaded thin-film lithium niobate electro-optic modulator with high modulation efficiency

Gongcheng Yue,Hongzhi Yang,Ziyue Zhang,Ting Hao,Lin Xiao,Yang Li

DOI: https://doi.org/10.1364/oe.524932

IF: 3.8

2024-06-11

Optics Express

Abstract:Gongcheng Yue, Hongzhi Yang, Ziyue Zhang, Ting Hao, Lin Xiao, Yang Li Thin film lithium niobate (TFLN) modulators with low driving voltage and high bandwidth are desirable for fiber-optic communication. ... [Opt. Express 32, 23161-23170 (2024)]

optics
Optimization and multiphysics analysis of high-performance lithium niobate modulators

Huangfan Wang,Hao Chen,Shaohua Yang,Huafeng Dong,Fugen Wu,Wenyuan Liao

DOI: https://doi.org/10.1364/ao.539535

IF: 1.9

2024-11-08

Applied Optics

Abstract:Huangfan Wang, Hao Chen, Shaohua Yang, Huafeng Dong, Fugen Wu, Wenyuan Liao Thin-film lithium niobate electro-optic modulators (TFLN EOMs) are widely utilized across various fields due to their exceptional ... [Appl. Opt. 63, 8389-8395 (2024)]

optics

Thin film lithium niobate electro-optic modulator with reduced half-wave voltage length product through design

Wideband Thin-Film Lithium Niobate Modulator with Low Half-Wave-voltage Length Product

Thin Film LiNbO3 Modulator Based on LiNbO3-Silica Hybrid Waveguide with Narrow Electrode Gap

Ultra-high Efficiency Electro-optic Modulator on Thin-film Lithium Niobate

Compact low-half-wave-voltage thin film lithium niobate electro-optic phase modulator fabricated by photolithography-assisted chemo-mechanical etching (PLACE)

High-efficiency Thin-Film Lithium Niobate Modulator with Highly Confined Optical Modes

High-efficiency Electro-Optic Modulators in Lithium Niobate on Insulator

Low Half-wave-voltage Thin Film LiNbO3 Electro-optic Modulator Based on a Compact Electrode Structure

Compact low-half-wave-voltage thin film lithium niobate electro-optic phase modulator fabricated by photolithography assisted chemo-mechanical etching

High-performance thin-film lithium niobate electro-optic modulator based on etching slot and ultrathin silicon film

Thin Film Lithium Niobate Electro-optic Modulator Based on a Slow Wave Structure

Study on Low Half-wave Voltage Electro-optic Modulator Based on Lithium Niobate

Design and Analysis of Lithium Niobate Electrooptic Modulators with T-Type Electrode

Ultra-compact Thin Film Lithium Niobate Electro-optic Modulator with Metal-filled Photonic Crystal Waveguide

Low half-wave-voltage, ultra-high bandwidth thin-film LiNbO3 modulator based on hybrid waveguide and periodic capacitively loaded electrodes

Polarization-Insensitive Electrooptic Modulation on Anisotropic Thin-Film Lithium Niobate

A Highly Compact Thin-film Lithium Niobate Modulator with Low Half-wave Voltage

Low Half-wave Voltage Thin-film Lithium Niobate Modulator with Ultra-flat Electro-optic Response

Broadband Thin-Film Lithium Niobate Electro-Optic Modulator

Dual-layer capacitance-loaded thin-film lithium niobate electro-optic modulator with high modulation efficiency

Optimization and multiphysics analysis of high-performance lithium niobate modulators